AGILENT 5517C激光紅色干涉儀 PDF資料
1.產(chǎn) 品 資 料 介 紹：
中文資料：
Agilent 5517C 激光紅色干涉儀 是由 Agilent Technologies（安捷倫科技） 生產(chǎn)的一款高精度干涉儀，主要用于精密測(cè)量和表面形貌分析。Agillent 5517C 是干涉儀產(chǎn)品線中的一款高端型號(hào)，專為高精度光學(xué)干涉測(cè)量設(shè)計(jì)，適用于各種高精度測(cè)量領(lǐng)域，尤其是在科學(xué)研究、制造業(yè)、半導(dǎo)體制造和精密機(jī)械加工等領(lǐng)域具有重要應(yīng)用。
主要特點(diǎn)：
高精度測(cè)量：
- Agilent 5517C 激光紅色干涉儀使用激光干涉技術(shù)，提供納米級(jí)的精度測(cè)量。其分辨率可以達(dá)到納米級(jí)別，適用于對(duì)表面形貌、位移、振動(dòng)等參數(shù)的精密測(cè)量。
- 通過干涉原理，能夠精確測(cè)量物體表面的微小變化，例如厚度、形狀、間隙、表面輪廓等。
激光源：
- 采用紅色激光源（波長為 632.8 nm），該波長的激光具有高穩(wěn)定性和精度，能夠提供清晰、穩(wěn)定的干涉條紋，進(jìn)而確保測(cè)量結(jié)果的高準(zhǔn)確性。
- 激光的使用可以提高系統(tǒng)的信號(hào)強(qiáng)度，保證在復(fù)雜的實(shí)驗(yàn)環(huán)境下仍能獲得精確的測(cè)量結(jié)果。
干涉原理：
- 該儀器基于激光干涉原理工作。通過比較參考光束與測(cè)試物體反射光束的相位差，Agilent 5517C 可以精確地計(jì)算出物體表面或位移的微小變化。
- 干涉儀通過分析干涉條紋的變化，可以測(cè)量表面形貌、物體的運(yùn)動(dòng)或位移，適用于動(dòng)態(tài)測(cè)量和靜態(tài)測(cè)量。
適用領(lǐng)域：
- 光學(xué)表面測(cè)量：用于測(cè)量表面形貌，如平面度、表面粗糙度等。
- 位移與振動(dòng)測(cè)量：適用于高精度位移測(cè)量和動(dòng)態(tài)振動(dòng)分析，常用于精密機(jī)械和自動(dòng)化設(shè)備的測(cè)試。
- 微型組件與半導(dǎo)體測(cè)量：廣泛應(yīng)用于半導(dǎo)體制造中的微型元件和微結(jié)構(gòu)的測(cè)量，確保產(chǎn)品的尺寸精度。
- 研究與開發(fā)：在科研領(lǐng)域，特別是物理學(xué)、材料科學(xué)和納米技術(shù)的研究中，5517C 激光干涉儀可以提供準(zhǔn)確的表面分析數(shù)據(jù)。
高穩(wěn)定性與重復(fù)性：
- 該設(shè)備具備優(yōu)異的穩(wěn)定性，能夠提供高重復(fù)性、低噪聲的測(cè)量結(jié)果。即便在環(huán)境條件變化較大的情況下，仍然能夠保持高精度。
用戶友好的界面：
- Agilent 5517C 配備直觀的操作界面，用戶可以輕松設(shè)置和操作儀器，進(jìn)行測(cè)量和數(shù)據(jù)分析。
- 提供各種數(shù)據(jù)輸出格式，方便用戶對(duì)測(cè)量結(jié)果進(jìn)行記錄、處理和進(jìn)一步分析。
多種應(yīng)用附件與功能：
- 該設(shè)備可與多種附件搭配使用，如光學(xué)反射鏡、探測(cè)器、掃描平臺(tái)等，以擴(kuò)展其功能和應(yīng)用范圍。適用于不同的測(cè)量任務(wù)和工件尺寸。
- 還可以進(jìn)行現(xiàn)場實(shí)時(shí)測(cè)量，適合在生產(chǎn)線或?qū)嶒?yàn)室環(huán)境中使用。
英文資料：
The Agilent 5517C laser red interferometer is a high-precision interferometer produced by Agilent Technologies, mainly used for precision measurement and surface morphology analysis. Agillent 5517C is a high-end model in the interferometer product line, designed specifically for high-precision optical interferometry measurement. It is suitable for various high-precision measurement fields, especially in scientific research, manufacturing, semiconductor manufacturing, and precision machining, and has important applications.
Main features:
High precision measurement:
The Agilent 5517C laser red interferometer uses laser interferometry technology to provide nanometer level precision measurements. Its resolution can reach the nanometer level, suitable for precise measurement of surface morphology, displacement, vibration and other parameters.
Through the principle of interference, it is possible to accurately measure small changes on the surface of an object, such as thickness, shape, gaps, surface contours, etc.
Laser source:
Using a red laser source (wavelength of 632.8 nm), this wavelength of laser has high stability and accuracy, providing clear and stable interference fringes to ensure high accuracy of measurement results.
The use of lasers can improve the signal strength of the system, ensuring accurate measurement results even in complex experimental environments.
Interference principle:
This instrument operates based on the principle of laser interference. By comparing the phase difference between the reference beam and the reflected beam of the test object, Agilent 5517C can accurately calculate small changes in the surface or displacement of the object.
Interferometers can measure surface morphology, object motion or displacement by analyzing the changes in interference fringes, and are suitable for dynamic and static measurements.
Applicable fields:
Optical surface measurement: used to measure surface morphology, such as flatness, surface roughness, etc.
Displacement and vibration measurement: suitable for high-precision displacement measurement and dynamic vibration analysis, commonly used for testing precision machinery and automation equipment.
Micro components and semiconductor measurement: widely used in the measurement of micro components and microstructures in semiconductor manufacturing to ensure the dimensional accuracy of products.
Research and development: In the field of scientific research, especially in physics, materials science, and nanotechnology, the 5517C laser interferometer can provide accurate surface analysis data.
High stability and repeatability:
This device has excellent stability and can provide measurement results with high repeatability and low noise. Even under significant changes in environmental conditions, high accuracy can still be maintained.
User friendly interface:
The Agilent 5517C is equipped with an intuitive user interface, allowing users to easily set up and operate the instrument for measurement and data analysis.
Provide various data output formats to facilitate users in recording, processing, and further analyzing measurement results.
Multiple application attachments and functions:
This device can be used in conjunction with various accessories, such as optical mirrors, detectors, scanning platforms, etc., to expand its functionality and application range. Suitable for different measurement tasks and workpiece sizes.
It can also perform real-time on-site measurements, suitable for use in production lines or laboratory environments.
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