LAM 810-028295-170溫度控制器 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
LAM 810-028295-170 是一款用于半導(dǎo)體設(shè)備的 溫度控制器。以下是其主要特點(diǎn):
精準(zhǔn)溫控:能夠精確控制和調(diào)節(jié)設(shè)備的溫度,確保半導(dǎo)體制造過程中的溫度穩(wěn)定性。
多種輸入支持:支持多種溫度傳感器輸入(如RTD、熱電偶等),兼容性強(qiáng),適應(yīng)不同應(yīng)用需求。
高響應(yīng)速度:快速響應(yīng)溫度變化,適用于需要快速調(diào)節(jié)的高精度溫控環(huán)境。
自動(dòng)校準(zhǔn)功能:具備自動(dòng)校準(zhǔn)功能,減少人工干預(yù),提高系統(tǒng)準(zhǔn)確性和穩(wěn)定性。
遠(yuǎn)程監(jiān)控與診斷:支持通過網(wǎng)絡(luò)遠(yuǎn)程監(jiān)控溫度數(shù)據(jù)和設(shè)備狀態(tài),便于故障診斷與維護(hù)。
溫度數(shù)據(jù)記錄:具備溫度數(shù)據(jù)采集與記錄功能,方便歷史數(shù)據(jù)分析和趨勢監(jiān)控。
工業(yè)級可靠性:設(shè)計(jì)符合工業(yè)標(biāo)準(zhǔn),能夠在高溫、高濕等惡劣環(huán)境中穩(wěn)定運(yùn)行。
安全性:具備過溫保護(hù)和報(bào)警功能,防止設(shè)備因過熱而損壞。
該溫度控制器適用于半導(dǎo)體制造、刻蝕、清洗等工藝設(shè)備中,確保溫控系統(tǒng)的精確性和穩(wěn)定性,提升生產(chǎn)效率和產(chǎn)品質(zhì)量。
英文資料:
LAM 810-028295-170 is a temperature controller used for semiconductor devices. The following are its main characteristics:
Precise temperature control: capable of accurately controlling and adjusting the temperature of equipment, ensuring temperature stability during semiconductor manufacturing processes.
Multiple input support: Supports multiple temperature sensor inputs (such as RTD, thermocouple, etc.), strong compatibility, and adapts to different application needs.
High response speed: Quickly respond to temperature changes, suitable for high-precision temperature control environments that require quick adjustment.
Automatic calibration function: It has automatic calibration function, reduces manual intervention, and improves system accuracy and stability.
Remote monitoring and diagnosis: Supports remote monitoring of temperature data and equipment status through the network, facilitating fault diagnosis and maintenance.
Temperature data recording: equipped with temperature data collection and recording functions, convenient for historical data analysis and trend monitoring.
Industrial grade reliability: Designed to meet industrial standards and capable of stable operation in harsh environments such as high temperature and high humidity.
Safety: Equipped with over temperature protection and alarm function to prevent equipment damage due to overheating.
This temperature controller is suitable for semiconductor manufacturing, etching, cleaning and other process equipment, ensuring the accuracy and stability of the temperature control system, improving production efficiency and product quality.
2.產(chǎn) 品 展 示
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