LAM 810-002895-102閥控制節(jié)點板 PDF資料
1.產(chǎn) 品 資 料 介 紹:
中文資料:
LAM 810-002895-102 是一款 閥控制節(jié)點板,用于半導(dǎo)體制造設(shè)備中,負責(zé)控制氣體閥門和其他流體系統(tǒng)的操作。以下是其主要特點:
精確閥門控制:能夠精確控制氣體或流體閥門的開關(guān),確保生產(chǎn)過程中的氣體流量和壓力穩(wěn)定。
多通道支持:支持多個閥門控制通道,適用于復(fù)雜的氣體管理系統(tǒng)或多閥控制應(yīng)用。
實時反饋與調(diào)整:提供實時數(shù)據(jù)采集和反饋,便于操作員調(diào)整閥門設(shè)定,確保系統(tǒng)運行的精度和穩(wěn)定性。
高可靠性:設(shè)計符合工業(yè)級標(biāo)準(zhǔn),能夠在高溫、高濕等惡劣環(huán)境中長期穩(wěn)定運行。
遠程監(jiān)控與控制:支持遠程監(jiān)控和控制功能,方便操作員進行系統(tǒng)診斷、調(diào)節(jié)和故障排查。
集成化設(shè)計:集成閥門控制、狀態(tài)監(jiān)測和故障報警等功能,簡化系統(tǒng)架構(gòu)和維護工作。
安全保護功能:具備氣體泄漏監(jiān)測、過壓保護等功能,確保設(shè)備安全運行,防止意外發(fā)生。
模塊化安裝:易于集成和安裝,方便與其他控制系統(tǒng)和設(shè)備配合工作。
該閥控制節(jié)點板廣泛應(yīng)用于半導(dǎo)體生產(chǎn)線和精密設(shè)備中,確保氣體控制系統(tǒng)的高效、安全運行,優(yōu)化生產(chǎn)過程中的流體管理。
英文資料:
LAM 810-002895-102 is a valve control node board used in semiconductor manufacturing equipment to control the operation of gas valves and other fluid systems. The following are its main characteristics:
Precise valve control: capable of accurately controlling the opening and closing of gas or fluid valves, ensuring stable gas flow and pressure during the production process.
Multi channel support: Supports multiple valve control channels, suitable for complex gas management systems or multi valve control applications.
Real time feedback and adjustment: Provides real-time data collection and feedback to facilitate operators in adjusting valve settings, ensuring the accuracy and stability of system operation.
High reliability: Designed to meet industrial standards, capable of long-term stable operation in harsh environments such as high temperature and high humidity.
Remote monitoring and control: Supports remote monitoring and control functions, facilitating system diagnosis, adjustment, and troubleshooting for operators.
Integrated design: Integrating valve control, status monitoring, and fault alarm functions to simplify system architecture and maintenance work.
Safety protection function: equipped with gas leakage monitoring, overpressure protection and other functions to ensure the safe operation of equipment and prevent accidents from occurring.
Modular installation: easy to integrate and install, convenient to work with other control systems and devices.
This valve control node board is widely used in semiconductor production lines and precision equipment, ensuring the efficient and safe operation of gas control systems and optimizing fluid management in the production process.
2.產(chǎn) 品 展 示
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