LAM 810-102361R222聯(lián)鎖電路板 PDF資料
1.產 品 資 料 介 紹：
中文資料：
LAM 810-102361R222 聯(lián)鎖電路板 是泛林半導體（LAM Research）設備中的一種關鍵組件，主要用于實現(xiàn)設備操作過程中的安全聯(lián)鎖功能。此電路板通過監(jiān)控和控制設備運行狀態(tài)，在必要時觸發(fā)保護機制，確保半導體制造設備的安全運行，保護操作人員和工藝環(huán)境。
產品特點
安全聯(lián)鎖功能：
- 監(jiān)控設備的狀態(tài)（如門鎖、氣壓、真空狀態(tài)等），確保系統(tǒng)滿足操作要求。
- 當檢測到異常狀態(tài)（如門未關閉或安全條件未滿足）時，觸發(fā)警報或切斷關鍵操作，避免風險。
高可靠性設計：
- 采用工業(yè)級元器件，能夠在高溫、高濕度等嚴苛環(huán)境中穩(wěn)定工作。
- 提供長時間無故障運行的能力，滿足半導體制造設備的高可靠性需求。
模塊化結構：
- 緊湊型設計，易于集成到不同設備中。
- 可與其他安全模塊或系統(tǒng)無縫配合。
實時監(jiān)控與快速響應：
- 內置高性能監(jiān)控芯片，能夠實時檢測狀態(tài)變化，并在毫秒級響應異常。
兼容性強：
- 專為 LAM Research 設備定制，與設備的其他控制系統(tǒng)兼容性良好。
技術規(guī)格（假設參考）
| 參數(shù) | 說明 |
|---|---|
| 供電電壓 | 24V DC 或根據(jù)設備要求定制 |
| 監(jiān)控通道數(shù) | 多通道設計，支持多點狀態(tài)監(jiān)測 |
| 響應時間 | < 5ms |
| 工作溫度范圍 | 0°C 至 70°C |
| 接口類型 | 標準信號接口（如TTL、I/O接口） |
| 尺寸 | 緊湊設計，適配設備內部空間 |
| 可靠性 | MTBF ≥ 100,000 小時 |
英文資料：
The LAM 810-102361R222 interlocking circuit board is a key component in LAM Research equipment, mainly used to implement safety interlocking functions during equipment operation. This circuit board monitors and controls the operating status of the equipment, triggering protective mechanisms when necessary to ensure the safe operation of semiconductor manufacturing equipment and protect operators and the process environment.
Product Features
Safety interlock function:
Monitor the status of equipment (such as door locks, air pressure, vacuum status, etc.) to ensure that the system meets operational requirements.
When an abnormal state is detected (such as a door not being closed or safety conditions not being met), an alarm is triggered or critical operations are cut off to avoid risks.
High reliability design:
Using industrial grade components, it can work stably in harsh environments such as high temperature and high humidity.
Provide the ability to operate without faults for a long time, meeting the high reliability requirements of semiconductor manufacturing equipment.
Modular structure:
Compact design, easy to integrate into different devices.
Can seamlessly integrate with other security modules or systems.
Real time monitoring and rapid response:
Built in high-performance monitoring chip, capable of real-time detection of status changes and responding to anomalies in milliseconds.
Strong compatibility:
Specially customized for LAM Research equipment, with good compatibility with other control systems of the equipment.
Technical specifications (assuming reference)
Parameter Description
Supply voltage 24V DC or customized according to equipment requirements
Multi channel design with multiple monitoring channels, supporting multi-point status monitoring
Response time<5ms
Working temperature range: 0 ° C to 70 ° C
Interface type: Standard signal interface (such as TTL, I/O interface)
Compact design to fit the internal space of the device
Reliability MTBF ≥ 100000 hours
2.產 品 展 示
3.其他產品
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